Semiconductors and Microelectronics

ISO4/5/6 Semiconductor Sensor Production Fast Installation Modular Clean Room

ISO4/5/6 Semiconductor Sensor Production Fast Installation Modular Clean Room

ISO4 Cleanliness semiconductor Ultra-Clean Room

Project: Semiconductor Production Workshop Fast Installation Modular Cleanroom
Area: 1400㎡
Inner height:3.5m
Class: ISO 4/5/6 (Class 10, 100, 1000);
Industry: Sensor/Semiconductor

Designed T/RH: Sensor/Semiconductor
Location: Shanghai/China

Characteristic:
1.Modular design enables easy upgrades:
  Airkey’s frames and keels are constructed with patented profiles, allowing for effortless future expansion and upgrades. The modular design significantly shortens production cycles and installation duration, realizing fast installation.

Integrated interlock buffer room In cleanroom

2.Integrated interlock buffer room:  
  The integrated design of the air shower and buffer room combines functionality with aesthetics. Equipped with infrared-sensor airflow activation and dual-door electronic interlocking, it effectively removes dust particles while preventing cross-airflow, ensuring high-efficiency maintenance of workspace cleanliness.

3.Intelligent control system:
  Cleanroom-compatible modular HVAC system with  prefabricated ducts for rapid installation. Precisely controls temperature/humidity to ensure comfort and full compliance with client’s production requirements.  

Smart modular HVAC system in semiconductor cleanroom

4.ISO 4 (Class 10) Ultra-Clean Room:
  To achieve Class 10 cleanliness, the cleanroom features a double-layer ceiling combined with raised flooring to create true laminar airflow. The perforated floor panels facilitate efficient air return, enhancing energy efficiency and enabling precise control of temperature, humidity, and pressure differentials.

Characteristic:
5.Rounded corners for easy cleaning:
  The modular cleanroom features rounded corner posts for easy cleaning and elimination of dust accumulation. Meanwhile, the transition rounded corners design also prevents collisions, ensuring a safe workspace. The flooring incorporates a 2mm pre-curled edge that extends vertically to form a continuous skirting, enabling seamless installation.

Anti-static PVC sheet flooring used in the cleanroom to prevent electrostatic discharge

6.Castle Series – Superior Performance:
  Rock-wool sandwich panels for the cleanroom wall structure, featuring a coated surface with strong corrosion resistance, weather durability, seamless smoothness, and fire resistance. The core material and panels are tightly bonded through composite technology, ensuring high structural integrity and compliance with ISO 14644 industry standards.

ISO 14644 Standard Rock-wool sandwich cleanroom panel ISO5 Cleanroom

7.Anti-static PVC Sheet Flooring:
   Joints of PVC sheets are bonded with conductive adhesive to form an integrated ESD protection network, Ensuring seamless ESD protection across the entire floor, eliminating performance gaps caused by local wear or seam issues. Maintains superior anti-static properties with minimal impact from humidity or temperature variations. 

8.EC FFUs deliver higher airflow:
  To meet the client's requirements for high air change rates and large airflow. Airkey employs high airflow EC FFUs to achieve the targeted airflow and cleanliness. The high airflow EC FFUs deliver exceptional cleanliness performance while operating with low noise and energy consumption, aligning with the client's sustainable production philosophy.

ISO4 Cleanliness semiconductor Ultra-Clean Room

9.Excellent performance, up to standard:
  On-site testing typically covers key parameters including cleanliness (e.g., ISO 4-6, Class 10-1,000), airflow velocity and uniformity, temperature, humidity, differential pressure, noise, and illumination. All metrics are verified to meet design specifications at one go test.

On-site testing semiconductor cleanroom performance