Semiconductors and Microelectronics

Modular Cleanroom Solutions Focused on Advanced Contamination Control for Semiconductor Industry

Modular Cleanroom Solutions Focused on Advanced Contamination Control for Semiconductor Industry

1.Prefabricated Modular Structure
    Constructed with an aluminum alloy frame and rock wool sandwich panels, equipped with a flush-mounted return air panel system that does not protrude, saving valuable cleanroom space. All components are prefabricated and pre-assembled in Airkey factory, allowing for efficient on-site modular installation. 

Interior of a Modular Cleanroom for Semiconductor Manufacturing

2. Large auto doors and observation windows
    Fitted with large, double-leaf electric sliding doors with automatic sensors, facilitating quick material entry and exit. Double-layer tempered glass windows are installed to enable real-time monitoring of operations inside the cleanroom.

Modular Cleanrooms for Semiconductors

3. Yellow tinted glass and yellow light
    To effectively block ultraviolet interference, all glass areas are made of amber glass. The internal lighting system is uniformly equipped with amber light fixtures to meet the requirements of photosensitive process environments.

Photolithography-Compatible Yellow Light Cleanroom Solution

4. Cleanroom equipment for Contamination Control
    An air shower is installed at the personnel entry point to remove dust particles carried by individuals. A dynamic pass-through chamber is used for material transfer, ensuring indoor cleanliness.

5. Compliant Gowning Room Design
    A gowning room is set up before entering the clean area, with gowning levels classified according to cleanliness requirements.

Modular Cleanrooms for Semiconductors

6. Excellent performance and standard parameters
    After factory processing, fabrication, pre-assembly, all parameters (class, illuminance, etc.) have passed the tests, well accepted.